Semiconductor
sustainable vacuum + abatement
World class technology
responsive support
HIGHVAC has been supporting the semiconductor industry for more than 25 years and remains one of the leading independent suppliers of vacuum and abatement solutions to the North American market. HIGHVAC specializes in providing quality solutions with a focus on decreasing the cost of ownership, increasing uptime, and ultimately making vacuum and abatement systems “transparent to operations”.
Water-cooled dry screw pumps
HIGHVAC’s iP series Dry Screw high vacuum pumps are world-class, proven industrial pumps. Our base model pumps are available in pumping speeds from 100 m3/hr to 800 m3/hr. This wide range of standard sizes provides many options for your process applications.
ECOGUARD™
Our EcoGuard™ products are designed to destroy and eliminate hazardous by-products vs. capturing the by-products for further costly & hazardous waste disposal. The EcoGuard™ product line also offers a low-operating-cost solution for process and abatement savings through our innovative control program.
Particle Abatement
A revolutionary powder trap, the Taisei Giken TRAPPACK particle traps remove particulate by-products from the exhaust effluents generated by Semiconductor and TFT LCD manufacturing processes, ion implantation, etching, CVD, etc. Reduce maintenance frequency and increase productivity.
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Semiconductor Vacuum & Abatement Services
In addition to our popular Advance Exchange Program, Highvac is proud to offer the following semiconductor/LCD/ solar industry services:
Service Programs
Pump Repair / Rebuild
Mag-Lev Turbo Pump Repair
LOOKING FOR semiconductor VACUUM PUMP service/repair OR MORE INFORMATION ON OUR ADVANCE EXCHANGE PROGRAM?
Give us a call at 719-260-1185 or Contact Us Here
Semiconductor Vacuum & Abatement Custom Solutions
Need a custom solution for your semiconductor, LCD, or solar production operation? Highvac is proud to offer quality custom solutions perfectly suited to your needs and applications. Here are some examples of the custom solutions we were able to develop for our customers:
EPITAXIAL ABATEMENT
SCREW PUMP RETROFIT
custom solutions
Looking for a custom solution of your own? We’re happy to help!
Give us a call at 719-260-1185 or Contact Us Here
Multi-Stage Dry Vacuum Pumps
Multi-stage dry vacuum pumps have been commercially available for over 30-35 years. Early versions were generally water-cooled, and in more recent years some air-cooled versions have been introduced. Due to the fact that typically 4-6 stages of compression are required to attain pressures close to what oil-sealed pumps are capable of in just two stages, multi-stage dry pumps create a…
Epitaxial Abatement
In 2014, Highvac was requested to deliver a SAFE and RELIABLE Point of Use abatement system to a major 200mm semiconductor manufacturer for their ASM Epsilon Epitaxy tool. The customer was originally utilizing a competitive burn/wet abatement device and experiencing significant maintenance requirements, mostly associated with inlet clogging. They then installed a wet scrubber in front of the existing burn/wet
Ebara A70W Screw Pump Retrofit
Dry Pumps are typically constructed of cast iron. Due to the corrosive environment of semiconductor processes such as Metal Etch and PECVD, the internal components become etched to the point that the pumps can no longer be effectively rebuilt. Short of replacing hundreds of pumps, end-users are left with few if any cost-effective options to sustain operations. New pumps are costly
Edwards Q Pump Oil Leaks
Having serviced thousands of Edwards iQDP80/QMB dry pump systems, Highvac recognized and developed a solution to significantly decrease booster seal failures; a problem that eventually results in oil either leaking out between the motor plate and kinetic drive, or migrating into the booster pump casing and dry pump, which ultimately causes failure of the dry pump. Contact us for our white
Custom Solutions
Highvac Corporation is proud to offer quality custom solutions to best suit client needs & applications. From retrofits to alternative shipping crate options, Highvac has a custom solution for you.
Highvac's High Standards
Highvac Corporation is committed to providing the highest standards of quality, safety, and reliability in its products and services with a constant focus on cost containment, cycle time, and quality.
