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Semiconductor

sustainable vacuum + abatement

World class technology

responsive support

HIGHVAC has been supporting the semiconductor industry for more than 25 years and remains one of the leading independent suppliers of vacuum and abatement solutions to the North American market. HIGHVAC specializes in providing quality solutions with a focus on decreasing the cost of ownership, increasing uptime, and ultimately making vacuum and abatement systems “transparent to operations”.

Water-cooled dry screw pumps

iP Series

HIGHVAC’s iP series Dry Screw high vacuum pumps are world-class, proven industrial pumps. Our base model pumps are available in pumping speeds from 100 m3/hr to 800 m3/hr. This wide range of standard sizes provides many options for your process applications.

iP Series Info

ECOGUARD™

Point-of-Use Abatement System

Our EcoGuard™ products are designed to destroy and eliminate hazardous by-products vs. capturing the by-products for further costly & hazardous waste disposal. The EcoGuard™ product line also offers a low-operating-cost solution for process and abatement savings through our innovative control program.

ECOGUARD™ Info

Particle Abatement

Taisei Giken TRAPPACK

A revolutionary powder trap, the Taisei Giken TRAPPACK particle traps remove particulate by-products from the exhaust effluents generated by Semiconductor and TFT LCD manufacturing processes, ion implantation, etching, CVD, etc. Reduce maintenance frequency and increase productivity.

TRAPPACK Info
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Semiconductor Vacuum & Abatement Services

In addition to our popular Advance Exchange Program, Highvac is proud to offer the following semiconductor/LCD/ solar industry services:

Service Programs

Pump Repair / Rebuild

Mag-Lev Turbo Pump Repair

LOOKING FOR semiconductor VACUUM PUMP service/repair OR MORE INFORMATION ON OUR ADVANCE EXCHANGE PROGRAM?
 
Give us a call at 719-260-1185 or Contact Us Here

Semiconductor Vacuum & Abatement Custom Solutions

Need a custom solution for your semiconductor, LCD, or solar production operation? Highvac is proud to offer quality custom solutions perfectly suited to your needs and applications. Here are some examples of the custom solutions we were able to develop for our customers:

EPITAXIAL ABATEMENT

ECOGUARD™ POU Abatement
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SCREW PUMP RETROFIT

for aging EBARA A70W pumps
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custom solutions

for all industries
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Looking for a custom solution of your own? We’re happy to help!
Give us a call at 719-260-1185 or Contact Us Here

Multi-Stage Dry Vacuum Pumps

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Multi-stage dry vacuum pumps have been commercially available for over 30-35 years. Early versions were generally water-cooled, and in more recent years some air-cooled versions have been introduced.  Due to the fact that typically 4-6 stages of compression are required to attain pressures close to what oil-sealed pumps are capable of in just two stages, multi-stage dry pumps create a…

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Epitaxial Abatement

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In 2014, Highvac was requested to deliver a SAFE and RELIABLE PoU (Point of Use) abatement system to a major 200mm semiconductor manufacturer for their ASM Epsilon Epitaxy tool. The customer was originally utilizing a competitive burn/wet PoU abatement device and experiencing significant maintenance requirements, mostly associated with inlet clogging. They then installed a PoU wet scrubber […]

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Ebara A70W Screw Pump Retrofit

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Dry Pumps are typically constructed of cast iron. Due to the corrosive environment of semiconductor processes such as Metal Etch and PECVD, the internal components become etched to the point that the pumps can no longer be effectively rebuilt. Short of replacing hundreds of pumps, end-users are left with few if any cost-effective options to sustain […]

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Edwards Q Pump Oil Leaks

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Having serviced thousands of Edwards iQDP80/QMB dry pump systems, Highvac recognized and developed a solution to significantly decrease booster seal failures; a problem that eventually results in oil either leaking out between the motor plate and kinetic drive, or migrating into the booster pump casing and dry pump, which ultimately causes failure of the dry […]

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Custom Solutions

 

Highvac Corporation is proud to offer quality custom solutions to best suit client needs & applications. From retrofits to alternative shipping crate options, Highvac has a custom solution for you.

View Custom Solutions

Highvac's High Standards

 

Highvac Corporation is committed to providing the highest standards of quality, safety, and reliability in its products and services with a constant focus on cost containment, cycle time, and quality.

Learn More About HIGHVAC

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Customer Compliments

“I just wanted to tell you that Jeff did some nice work for me. He's really a great resource for us, and he's very pleasant to work with”

“I just wanted to let you know we had an A70 pump die last night that was rebuilt by you. The reason I’m writing is to say thank you for such a good quality rebuild! This pump was in service for 7 years. The higher ups are impressed. I’m trying to prove the quality of your rebuilds and this was exactly what they needed to see. You all are doing great and I enjoy doing business with you.”

“Thanks for the class, everyone was pleased with it. Tony did a great job. BTW, nice results on Tuesday don't you think. Good job Tony!”

“Just a heads up, I have finished testing the SDE120’s we got on the last delivery and they have fantastic vacuum.  So, just to let you know they all tested around 1mT or less.  The pump down times were really good too. I think all of them were under 5mT in under 10 minutes.  Let the guys know to keep up the good work.”

“Met with the owner for a long visit and toured the company as a customer for the vacuum pump product they are releasing. It is a well run operation, with great leadership. This company is inventive, they clearly have developed the products that we need, and the reliabilty we require. I predict they will continue to roll out successful products.”

“You have always done an excellent job in meeting our needs and supporting us. That's why I always call you first for our vacuum related needs.”

"I just wanted to thank you for getting us pumps as fast as you have, to include good quality work."

You and your team kicked butt this weekend and made it possible to get my tool back up and running with the new Edwards STP-A1303C turbo, to include a Saturday delivery. This was greatly appreciated by many to include me. Please send thanks to Van also for his help over the phone with testing these turbos and for getting the new one ready to go so fast.

"This is a Thank You to Dave.  He comes in with a professional attitude daily and is always willing to help us with our pump needs.  I rely on Dave to keep an eye on my pumps and assist with any repairs needed to keep our pumps running, either electrical or mechanical…"

“Everyone is wonderful to work with. They go out of their way when I need something right away.”

"This week has been extremely busy and Ben stepped up his game(as usual) to ensure that the customer’s needs were exceeded. This was recognized by the production manager and he gave Ben a Kudo’s(meal card for the cafeteria)."

Michele, Thanks to you and to everyone at Highvac for great support. The customer and I are extremely grateful. I can only wish our other suppliers were as responsive. Fred