The Single Column is our legacy model that pioneered the EcoGuard™ technology. The SC features a single column scrubber with a dual inlet/dual burner to handle the exhaust of two pumps/semiconductor process chambers.

Existing abatement solutions aim to scrub then dispose of hazardous by-products created during LED, LCD, Semiconductor, and Solar production processes. With increasing regulations and costs associated with utilities such as power and water, the common “wet scrubbers” and “chemical adsorption” methods utilized by such technologies have become inefficient.

EcoGuard™ abatement technology is a burn/wet PoU (Point of Use) abatement system. In addition to a liquid re-circulation pump and sump tank, it uses a final stage fresh water polish to boost scrubbing efficiency. The system is controlled and monitored by a Siemens PLC and touch panel interface module. It will run up to four process chambers.

Our EcoGuard™ PoU abatement systems are designed to destroy and eliminate hazardous byproducts vs. capturing the by-products for further, costly, hazardous waste disposal. Using sensor-driven process signals, operators can control the type of abatement required for the particular gas and use only what is necessary to abate and emit clean air to the environment.