by highvac-corporation | May 15, 2024 | EPI, Semiconductor, Semiconductor Gas Abatement
Looking to move away from carbon-based fuels in your semiconductor gas abatement equipment? HIGHVAC manufactures a hydrogen-fueled semiconductor abatement tool that will not flame out, clog, or produce NOx – ideally suited for atmospheric and low/reduced pressure EPI...
by highvac-corporation | Feb 7, 2022 | Custom Solutions, EPI, Semiconductor, Semiconductor Gas Abatement
In 2014, Highvac was requested to deliver a SAFE and RELIABLE Point of Use abatement system to a major 200mm semiconductor manufacturer for their ASM Epsilon Epitaxy tool. The customer was originally utilizing a competitive burn/wet abatement device and experiencing...