Looking to move away from carbon-based fuels in your semiconductor gas abatement equipment? HIGHVAC manufactures a hydrogen-fueled semiconductor abatement tool that will not flame out, clog, or produce NOx – ideally suited for atmospheric and low/reduced pressure EPI reactor tools.
– Decrease scope 1 emissions from the subfab.
– Decrease maintenance and operating costs.
– Decrease downtime/increase the uptime of your epitaxial reactor process tools.
Move away from carbon-fueled semiconductor abatement.
HIGHVAC EcoGuard SGS – The FUTURE of semiconductor process abatement – available NOW.