by highvac-corporation | May 15, 2024 | EPI, Semiconductor, Semiconductor Gas Abatement
Looking to move away from carbon-based fuels in your semiconductor gas abatement equipment? HIGHVAC manufactures a hydrogen-fueled semiconductor abatement tool that will not flame out, clog, or produce NOx – ideally suited for atmospheric and low/reduced pressure EPI...
by highvac-corporation | Feb 17, 2022 | Botanical Processing, Coating, General Industrial, Laboratory/Scientific, Pharmaceutical, Semiconductor
Multi-stage dry vacuum pumps have been commercially available for over 30-35 years. Early versions were generally water-cooled, and in more recent years some air-cooled versions have been introduced. Due to the fact that typically 4-6 stages of compression are...
by highvac-corporation | Feb 7, 2022 | Custom Solutions, EPI, Semiconductor, Semiconductor Gas Abatement
In 2014, Highvac was requested to deliver a SAFE and RELIABLE Point of Use abatement system to a major 200mm semiconductor manufacturer for their reduced pressure epitaxy tool. The customer was originally utilizing a competitive burn/wet abatement device and...
by highvac-corporation | Feb 7, 2022 | Custom Solutions, Semiconductor
Dry Pumps are typically constructed of cast iron. Due to the corrosive environment of semiconductor processes such as Metal Etch and PECVD, the internal components become etched to the point that the pumps can no longer be effectively rebuilt. Short of replacing...
by highvac-corporation | Feb 7, 2022 | Custom Solutions, Semiconductor
Having serviced thousands of Edwards iQDP80/QMB dry pump systems, Highvac recognized and developed a solution to significantly decrease booster seal failures; a problem that eventually results in oil either leaking out between the motor plate and kinetic drive, or...
