Vacuum and Abatement Solutions
sustainable vacuum + abatement
World class technology
responsive support
HIGHVAC has been supporting the semiconductor industry for more than 25 years and remains one of the leading independent suppliers of vacuum and abatement solutions to the North American market. HIGHVAC specializes in providing quality solutions with a focus on decreasing the cost of ownership, increasing uptime, and ultimately making vacuum and abatement systems “transparent to operations”.
Designed for Semiconductor
The iPH series semiconductor rated pumps feature the latest in controls with up-to-date SEMI E73 interface standard.
Other features that enhance the capabilites of these pumps in harsh duty applications include:
• Short gas path
• Integrated N2 Heater
• Power saving VFDs
• Idle mode (green mode)
• Advanced temperature control
• Multiple internal coating options
Hanbell pumps provide both increased lifecycle and decreased cost of ownership. These factors combined
with a highly competitive lead time make Hanbell an excellent choice. Highvac and Hanbell have forged a strong
working relationship to deliver this combination of service and quality to the North American market.
SGS Series
The first PoU abatement system that maintains complete separation of multiple chamber gas streams through the entire system.
• Scalable to multiple inlets
• High gas flow capability
• Ideal for RPC or high flow EPI
• Highly configurable
• F-GHG DRE > 99% (*CF4 > 90%)
• NH3 DRE > 99%
The EcoGuard SGS series utilizes separate inlets, burn chambers, and
scrubber columns to ensure complete separation of gas streams from multiple
chambers. The separated gas stream technology mitigates the combination
of harmful gases from deposition and clean cycles, which can create large
amounts of ammonium compound byproducts.