Ebara Vacuum Pumps

Highvac was an authorized sales and service center for Ebara from 1993 to 2004, and still services most Ebara model vacuum pumps. Our rebuild program originated from OEM factory training, tooling, and instructions.

Looking for Ebara vacuum pump sales or services? We offer vacuum pump parts and repair for most models.

Highvac specializes in total sub-fab vacuum and abatement support for large-scale semiconductor end users.

Contact us now for more information:

Phone: (866) 279-0024
Email: help@highvacgroup.com

Ebara Models We Service

40X20
50X20
65X40
80X25
80X25
80X25
80X25
150X40

A07V
A10
A25
A30W
A30W-N
A70W
A70W Ni
A70W-B
A70W-S
A150W-M

AA10
AA10N
AA40WN
AA70WN
ESR20N
EV-A06-1
EVA-A10-2
EV-S20N

Need your pump serviced?

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Get In Touch

Phone: (866) 279-0024

Email: repair@highvacgroup.com

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