brands we service

Looking for vacuum pump services? We offer vacuum pump parts and repair for most models.

Highvac specializes in total sub-fab vacuum and abatement support for large-scale semiconductor end users.

Manufacturer	Model	Style
Alcatel	A100-IPUP	Dry
Alcatel	ACP20	Dry
Alcatel	ACP28	Dry
Alcatel	ACP28i	Dry
Alcatel	ADP31M1	Dry
Alcatel	ADP81	Dry
Alcatel	ADP122P	Dry
Alcatel	ADP131M	Dry
Alcatel	ADS501	Dry
Alcatel	ADS602P	Dry
Alcatel	ADS1202	Dry
Alcatel	Drytel 31	Dry
Alcatel	Drytel 34	Dry
Anelva	V090S-NU	Dry
Ebara	40X20	Dry
Ebara	50X20	Dry
Ebara	65X40 STD	Dry
Ebara	80X25 MAN	Dry
Ebara	80X25 Ni-S	Dry
Ebara	80X25 STD	Dry
Ebara	80X25 UT	Dry
Ebara	150X40	Dry
Ebara	A07V	Dry
Ebara	A10	Dry
Ebara	A25	Dry
Ebara	A30W	Dry
Ebara	A30W-N	Dry
Ebara	A70W	Dry
Ebara	A70W Ni	Dry
Ebara	A70W-B	Dry
Ebara	A70W-S	Dry
Ebara	A150W-M	Dry
Ebara	AA10	Dry
Ebara	AA10N	Dry
Ebara	AA40WN	Dry
Ebara	AA70WN	Dry
Ebara	ESR20N	Dry
Ebara	EV-A06-1	Dry
Ebara	EVA-A10-2	Dry
Ebara	EV-S20N	Dry
Edwards	DP40	Dry
Edwards	DP80	Dry
Edwards	ELH QDP80	Dry
Edwards	GV80	Dry
Edwards	IGX6-100	Dry
Edwards	IGX100	Dry
Edwards	IGX100M	Dry
Edwards	IGX600L	Dry
Edwards	IGX600M	Dry
Edwards	iH80	Dry
Edwards	iH160	Dry
Edwards	iH600	Dry
Edwards	iH1000	Dry
Edwards	iH1800	Dry
Edwards	iL70	Dry
Edwards	IL600	Dry
Edwards	iQDP40	Dry
Edwards	iQDP80	Dry
Edwards	iQDP80 WS-MOD	Dry
Edwards	iXH1220	Dry
Edwards	iXL120N	Dry
Edwards	QDP40	Dry
Edwards	QDP80	Dry
Edwards	QMKII	Dry
Hanbell	PD120	Dry
Hanbell	PS80A	Dry
Hanbell	PS80-HC	Dry
Hanbell	PS602 NI	Dry
Kashiyama	HC60	Dry
Kashiyama	MU100	Dry
Kashiyama	MU100X	Dry
Kashiyama	MU303	Dry
Kashiyama	MU303X	Dry
Kashiyama	MU603X	Dry
Kashiyama	MU1203	Dry
Kashiyama	NEODRY15C	Dry
Kashiyama	NEODRY15E-1	Dry
Kashiyama	NEODRY15E-2	Dry
Kashiyama	NEODRY30C-1	Dry
Kashiyama	NEODRY30C-2	Dry
Kashiyama	NEODRY30E-1	Dry
Kashiyama	NEODRY30E-2	Dry
Kashiyama	NEODRY36	Dry
Kashiyama	NEODRY36C	Dry
Kashiyama	NEODRY36E	Dry
Kashiyama	NEODRY36E-1	Dry
Kashiyama	NEODRY36E-2	Dry
Kashiyama	NEODRY36E-3	Dry
Kashiyama	NEODRY60-E	Dry
Kashiyama	NV60N	Dry
Kashiyama	SD30K	Dry
Kashiyama	SD90	Dry
Kashiyama	SD600	Dry
Kashiyama	SDE90	Dry
Kashiyama	SDE90X	Dry
Kashiyama	SDE120	Dry
Kashiyama	SDE603A	Dry
Kashiyama	SDE603X	Dry
Kashiyama	SDE1200	Dry
Kashiyama	SDE1203	Dry
Kashiyama	SDE1203TXS	Dry
Kashiyama	SDE2003BS	Dry
Kashiyama	SDE2003TZ	Dry
Kashiyama	SDL30K	Dry
Kashiyama	SDL40K	Dry
Leybold	250DryScrewPump	Dry
Leybold	WAU250	Dry
Leybold	WAU251	Dry
Leybold	WAU501	Dry
Leybold	WAU1001	Dry
Leybold	WS151	Dry
Leybold	WS251	Dry
Leybold	WS500	Dry
Leybold	WS501	Dry
Leybold	WS1001	Dry
Leybold	WS2001	Dry
Leybold	WSU151	Dry
Leybold	WSU250	Dry
Leybold	WSU251	Dry
Leybold	WSU500	Dry
Leybold	WSU501	Dry
Leybold	WSU1001	Dry
Leybold	WSU2001H	Dry

Don't see your model on this list? Please call us at 719-260-1185 / 866-279-0024 or Contact Us Here

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Custom Solutions

Highvac Corporation is proud to offer quality custom solutions to best suit client needs & applications. From retrofits to alternative shipping crate options, Highvac has a custom solution for you.

View Custom Solutions

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Highvac's High Standards

Highvac Corporation is committed to providing the highest standards of quality, safety, and reliability in its products and services with a constant focus on cost containment, cycle time, and quality.

Learn More About HIGHVAC

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Customer Compliments

“I just wanted to tell you that Jeff did some nice work for me. He's really a great resource for us, and he's very pleasant to work with”

“I just wanted to let you know we had an A70 pump die last night that was rebuilt by you. The reason I’m writing is to say thank you for such a good quality rebuild! This pump was in service for 7 years. The higher ups are impressed. I’m trying to prove the quality of your rebuilds and this was exactly what they needed to see. You all are doing great and I enjoy doing business with you.”

“Thanks for the class, everyone was pleased with it. Tony did a great job. BTW, nice results on Tuesday don't you think. Good job Tony!”

“Just a heads up, I have finished testing the SDE120’s we got on the last delivery and they have fantastic vacuum. So, just to let you know they all tested around 1mT or less. The pump down times were really good too. I think all of them were under 5mT in under 10 minutes. Let the guys know to keep up the good work.”

“Met with the owner for a long visit and toured the company as a customer for the vacuum pump product they are releasing. It is a well run operation, with great leadership. This company is inventive, they clearly have developed the products that we need, and the reliabilty we require. I predict they will continue to roll out successful products.”

“You have always done an excellent job in meeting our needs and supporting us. That's why I always call you first for our vacuum related needs.”

"I just wanted to thank you for getting us pumps as fast as you have, to include good quality work."

You and your team kicked butt this weekend and made it possible to get my tool back up and running with the new Edwards STP-A1303C turbo, to include a Saturday delivery. This was greatly appreciated by many to include me. Please send thanks to Van also for his help over the phone with testing these turbos and for getting the new one ready to go so fast.

"This is a Thank You to Dave. He comes in with a professional attitude daily and is always willing to help us with our pump needs. I rely on Dave to keep an eye on my pumps and assist with any repairs needed to keep our pumps running, either electrical or mechanical…"

“Everyone is wonderful to work with. They go out of their way when I need something right away.”

"This week has been extremely busy and Ben stepped up his game(as usual) to ensure that the customer’s needs were exceeded. This was recognized by the production manager and he gave Ben a Kudo’s(meal card for the cafeteria)."

Michele, Thanks to you and to everyone at Highvac for great support. The customer and I are extremely grateful. I can only wish our other suppliers were as responsive. Fred