brands we service
Looking for vacuum pump services? We offer vacuum pump parts and repair for most models.
Highvac specializes in total sub-fab vacuum and abatement support for large-scale semiconductor end users.
Manufacturer |
Model |
Style |
Alcatel | A100-IPUP | Dry |
Alcatel | ACP20 | Dry |
Alcatel | ACP28 | Dry |
Alcatel | ACP28i | Dry |
Alcatel | ADP31M1 | Dry |
Alcatel | ADP81 | Dry |
Alcatel | ADP122P | Dry |
Alcatel | ADP131M | Dry |
Alcatel | ADS501 | Dry |
Alcatel | ADS602P | Dry |
Alcatel | ADS1202 | Dry |
Alcatel | Drytel 31 | Dry |
Alcatel | Drytel 34 | Dry |
Anelva | V090S-NU | Dry |
Ebara | 40X20 | Dry |
Ebara | 50X20 | Dry |
Ebara | 65X40 STD | Dry |
Ebara | 80X25 MAN | Dry |
Ebara | 80X25 Ni-S | Dry |
Ebara | 80X25 STD | Dry |
Ebara | 80X25 UT | Dry |
Ebara | 150X40 | Dry |
Ebara | A07V | Dry |
Ebara | A10 | Dry |
Ebara | A25 | Dry |
Ebara | A30W | Dry |
Ebara | A30W-N | Dry |
Ebara | A70W | Dry |
Ebara | A70W Ni | Dry |
Ebara | A70W-B | Dry |
Ebara | A70W-S | Dry |
Ebara | A150W-M | Dry |
Ebara | AA10 | Dry |
Ebara | AA10N | Dry |
Ebara | AA40WN | Dry |
Ebara | AA70WN | Dry |
Ebara | ESR20N | Dry |
Ebara | EV-A06-1 | Dry |
Ebara | EVA-A10-2 | Dry |
Ebara | EV-S20N | Dry |
Edwards | DP40 | Dry |
Edwards | DP80 | Dry |
Edwards | ELH QDP80 | Dry |
Edwards | GV80 | Dry |
Edwards | IGX6-100 | Dry |
Edwards | IGX100 | Dry |
Edwards | IGX100M | Dry |
Edwards | IGX600L | Dry |
Edwards | IGX600M | Dry |
Edwards | iH80 | Dry |
Edwards | iH160 | Dry |
Edwards | iH600 | Dry |
Edwards | iH1000 | Dry |
Edwards | iH1800 | Dry |
Edwards | iL70 | Dry |
Edwards | IL600 | Dry |
Edwards | iQDP40 | Dry |
Edwards | iQDP80 | Dry |
Edwards | iQDP80 WS-MOD | Dry |
Edwards | iXH1220 | Dry |
Edwards | iXL120N | Dry |
Edwards | QDP40 | Dry |
Edwards | QDP80 | Dry |
Edwards | QMKII | Dry |
Hanbell | PD120 | Dry |
Hanbell | PS80A | Dry |
Hanbell | PS80-HC | Dry |
Hanbell | PS602 NI | Dry |
Kashiyama | HC60 | Dry |
Kashiyama | MU100 | Dry |
Kashiyama | MU100X | Dry |
Kashiyama | MU303 | Dry |
Kashiyama | MU303X | Dry |
Kashiyama | MU603X | Dry |
Kashiyama | MU1203 | Dry |
Kashiyama | NEODRY15C | Dry |
Kashiyama | NEODRY15E-1 | Dry |
Kashiyama | NEODRY15E-2 | Dry |
Kashiyama | NEODRY30C-1 | Dry |
Kashiyama | NEODRY30C-2 | Dry |
Kashiyama | NEODRY30E-1 | Dry |
Kashiyama | NEODRY30E-2 | Dry |
Kashiyama | NEODRY36 | Dry |
Kashiyama | NEODRY36C | Dry |
Kashiyama | NEODRY36E | Dry |
Kashiyama | NEODRY36E-1 | Dry |
Kashiyama | NEODRY36E-2 | Dry |
Kashiyama | NEODRY36E-3 | Dry |
Kashiyama | NEODRY60-E | Dry |
Kashiyama | NV60N | Dry |
Kashiyama | SD30K | Dry |
Kashiyama | SD90 | Dry |
Kashiyama | SD600 | Dry |
Kashiyama | SDE90 | Dry |
Kashiyama | SDE90X | Dry |
Kashiyama | SDE120 | Dry |
Kashiyama | SDE603A | Dry |
Kashiyama | SDE603X | Dry |
Kashiyama | SDE1200 | Dry |
Kashiyama | SDE1203 | Dry |
Kashiyama | SDE1203TXS | Dry |
Kashiyama | SDE2003BS | Dry |
Kashiyama | SDE2003TZ | Dry |
Kashiyama | SDL30K | Dry |
Kashiyama | SDL40K | Dry |
Leybold | 250DryScrewPump | Dry |
Leybold | WAU250 | Dry |
Leybold | WAU251 | Dry |
Leybold | WAU501 | Dry |
Leybold | WAU1001 | Dry |
Leybold | WS151 | Dry |
Leybold | WS251 | Dry |
Leybold | WS500 | Dry |
Leybold | WS501 | Dry |
Leybold | WS1001 | Dry |
Leybold | WS2001 | Dry |
Leybold | WSU151 | Dry |
Leybold | WSU250 | Dry |
Leybold | WSU251 | Dry |
Leybold | WSU500 | Dry |
Leybold | WSU501 | Dry |
Leybold | WSU1001 | Dry |
Leybold | WSU2001H | Dry |
Don't see your model on this list? Please call us at 719-260-1185 / 866-279-0024 or Contact Us Here
Custom Solutions
Highvac Corporation is proud to offer quality custom solutions to best suit client needs & applications. From retrofits to alternative shipping crate options, Highvac has a custom solution for you.
Highvac's High Standards
Highvac Corporation is committed to providing the highest standards of quality, safety, and reliability in its products and services with a constant focus on cost containment, cycle time, and quality.