Taisei Giken
PARTICLE ABATEMENT
Taisei Giken TRAPPACK particle traps remove particulate by-products from the exhaust effluents generated by Semiconductor and TFT LCD manufacturing processes, ion implantation, etching, CVD, etc.
Sub-micron (especially fine) particles of below 1 micron exhausted from CVD devices can be completely shut out by centrifugal coil swirling and our proprietary engineered element.
As there is almost no conductance loss, the TRAPPACK can be applied to either the fore line or exhaust line of the vacuum pump. It is a revolutionary powder trap to treat the sub-micron particles which conventional traps can not remove. Reduce maintenance frequency and increase productivity.
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TRAPPACK Models We Sell and Service
TU-KN100
TU-KN500W
TU-500
TU-KN200
TU-200
TU-500W
TU-KN500
TU-250
TU-1000
TRAPPACK Filter Element Types
EL
HL
ASD-25LM
ASD-85LM
ASD-3100
EL-130
GL130
HL-130
HL-VG130
IL-G50-250
FL
IL
ASD-50LM
ASD-1500
ASD-4100
EL-250
GL250
HL-G50-130
HL-VG50-130
GL
KL
ASD-65LM
ASD-2100
GL-V250
EL-V400
HJ-13PCT
HL-G50-250
HP-450
TU-35R
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Sales
Email: sales@highvacgroup.com
Phone: 1(866) 279-0024
Service
Email: repair@highvacgroup.com
Phone: 1(866) 279-0024
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Phone: 1(866) 279-0024