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Taisei Giken

PARTICLE ABATEMENT

 

Taisei Giken TRAPPACK particle traps remove particulate by-products from the exhaust effluents generated by Semiconductor and TFT LCD manufacturing processes, ion implantation, etching, CVD, etc.

Sub-micron (especially fine) particles of below 1 micron exhausted from CVD devices can be completely shut out by centrifugal coil swirling and our proprietary engineered element.

As there is almost no conductance loss, the TRAPPACK can be applied to either the fore line or exhaust line of the vacuum pump. It is a revolutionary powder trap to treat the sub-micron particles which conventional traps can not remove. Reduce maintenance frequency and increase productivity.

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Call today: 1(866) 279-0024

Email: sales@highvacgroup.com

TRAPPACK Models We Sell and Service

TU-KN100

TU-KN500W

TU-500

TU-KN200

TU-200

TU-500W

TU-KN500

TU-250

TU-1000

TRAPPACK Filter Element Types

EL

HL

ASD-25LM

ASD-85LM

ASD-3100

 EL-130

GL130

HL-130

HL-VG130

IL-G50-250

FL

IL

ASD-50LM

ASD-1500

ASD-4100

EL-250

GL250

HL-G50-130

HL-VG50-130

GL

KL

ASD-65LM

ASD-2100

GL-V250

EL-V400

HJ-13PCT

HL-G50-250

HP-450

TU-35R

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Phone: 1(866) 279-0024