Ebara A70W Screw Pump Retrofit
Dry Pumps are typically constructed of cast iron. Due to the corrosive environment of semiconductor processes such as Metal Etch and PECVD, the internal components become etched to the point that the pumps can no longer be effectively rebuilt. Short of replacing...
Edwards Q Pump Oil Leaks
Having serviced thousands of Edwards iQDP80/QMB dry pump systems, Highvac recognized and developed a solution to significantly decrease booster seal failures; a problem that eventually results in oil either leaking out between the motor plate and kinetic drive, or...
Lighting the way
Highvac uses LED Lighting to fix and repair rotary vane oil pumps. These LED Lights are utilized throughout the facility reducing energy and increasing productivity.