Steed VTA

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Steed VTA


The Vacuum Thermal Annealing System or “VTA” is a unique, patent, semiconductor processing tool designed to thermally process copper interconnects and low K / ultra low K dielectric materials.

In addition, it is applicable to the processing of refractory metal silicides/alloys and other sensitive metals such as gold and silver. Likewise it has application in the thermal processing of III/V materials such as gallium arsenide and, in a special configuration, the growth of thin, high dielectric integrity oxides.

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