Thermal

Thermal Products

We are the manufacturer and distributor of Steed Horizontal Pilot Line Furnace Products. A full line of small batch and research horizontal furnace systems set up for a variety of process solutions. Wafer size ranging from 75-300mm, manual or automatic loading and from single tube up to eight tube systems.

Steed R&D Product Line

A full line of small batch and research horizontal furnace systems set up for a variety of process solutions. Wafer size ranging from 75-300mm, manual or automatic loading and from single tube up to eight tube systems.

 

Steed ST Product Line

This design is fully self-contained in a single frame and includes an integral gas supply module. The system may be used for diffusion, oxidation and LPCVD processing of 3″-6″ substrates.

 

Steed VTA Product Line

This new design is fully self-contained in a single frame and includes an integral gas supply module. The system may be used for diffusion, oxidation and LPCVD processing of 3″-6″ substrates.

Other Steed components and products are now available.

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